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SEM equipment Product List

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CD-SEM

CD-SEM

CDSEM, boasting an overwhelming market share, along with the Hitachi S8000 and S9000 series. We have a constant inventory of equipment and a complete demonstration system in place.

【Equipment Modification】 ■ Sale of refurbished used equipment ■ Modification for small diameter and compound wafers ■ SMIF to open cassette modification ■ Modification for multiple wafer types (using tray) 【Regular Maintenance】 ■ Chip replacement 【Relocation Services】 ■ In-house relocation ■ Factory relocation 【Troubleshooting】

  • Semiconductor inspection/test equipment
  • SEM equipment

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[Analysis Case] Three-Dimensional Observation of Lithium-Ion Secondary Battery Electrodes

[Analysis Case] Three-Dimensional Observation of Lithium-Ion Secondary Battery Electrodes

Observation of filling degree and voids using Slice and View.

The electrodes of lithium-ion secondary batteries are composed of active materials, conductive additives, and binders for both the positive and negative electrodes. The characteristics of the battery, such as capacity and reliability, are greatly influenced by the combination of materials, mixing ratios, filling density of active materials, and voids. Among these, FIB-SEM observation, which allows for processing and observation in a completely dry atmosphere, is very effective for observing filling density and voids. Furthermore, by conducting three-dimensional observation (Slice & View), it is possible to directly evaluate the condition of the electrodes.

  • リチウムイオン二次電池の基本構造.png
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  • Contract Analysis
  • SEM equipment

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